Specifications
- measurement range (X x Y x Z) : 300 to 600 x 200 to 650 x 200 to 250 mm
- Observation device: program-controlled power turret 1 x -2 x -6 x
- Minimum Displayed Amount: 0.02 μm
- Length measuring unit: linear encoder
- Imaging Device: B CCD (1/2 Type)
- lighting devices (Vertical epi-illumination, transmitted illumination, and program controlled ring illumination): white LEDs
- Measurement Precision E1/X/Y Axis: (0.8 + 2L/1000) μm
- Measurement accuracy E1/Z axis: (1.5 + 2L/1000) μm
- Measurement accuracy in E2/XY plane: (1.4 + 3L/1000) μm
- Tracking auto focus device: with/without
- Size of glass: 399 to 697 x 271 to 758 mm
- maximum loading capacity of measurement: 15 to 40 kg
- Tracking autofocus/laser light source: semiconductor laser peak wavelength 690 mm
- Tracking auto focus/laser safety: Class (JIS C 68022011, EN/IEC 60825 -12007) compliant
- Tracking auto focus system: Coaxial objective lens system (knife-edge method)
- Tracking Autofocus/Adaptive Objective: QV-HR1x, QV-SL1x, QV-HR 2.5 x, QV-SL 2.5 x, QV -5 x
- Tracking range: QV-HR1x, QV-SL1x/6.3 mm (± 3.15 mm), QV-HR 2.5 x, QV-SL 2.5 x/1 mm (± 0.5 mm), QV -5 x/0.25 mm (± 0.125 mm)
- Size: External view of main unit Dimensions (W x D x H)/859 to 1309 x 951 to 1985 x 1609 to 1794 mm
- Weight: Approx. 360 to 1450 kg
- *Please inquire about the price.
- *You need to register as an AXEL shop member to issue an estimate.
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